Clang. Fatal error: recursive template instantiation exceeded maximum depth

I have a class Index similar to std::integer_sequence:

template<std::size_t... NValues>
struct Index { };

And I wanna Fill it with sequence N-1, N-2, ..., 2, 1, 0.

template<std::size_t N>
struct MakeIndex
{
private:
    template<std::size_t I, std::size_t... NIndexValues>
    struct _Make;

public:
    using Type = typename _Make<N>::Type;

private:
    template<std::size_t I, std::size_t... NIndexValues>
    struct _Make
    {
        using Type = typename _Make<I - 1, NIndexValues..., I - 1>::Type;
    };
    template<std::size_t... NIndexValues>
    struct _Make<0, NIndexValues...>
    {
        using Type = Index<NIndexValues...>;
    };
};

int main()
{
    using T = MakeIndex<5>::Type;
}

On clang compiler(3.7.0), it produce

fatal error: recursive template instantiation exceeded maximum depth of 256

Example

It works very well on VS and GCC. Maybe I did something wrong? Or it is compiler bug?